Hardware RAID controllers should not be used with ZFS. While ZFS will likely be more reliable than other filesystems on Hardware RAID, it will not be as reliable as it would be on its own.
* Hardware RAID will limit opportunities for ZFS to perform self healing on checksum failures
is limited. When ZFS does RAID-Z or mirroring, a checksum failure on one disk can be corrected by treating the disk containing the sector as bad for the purpose of reconstructing the original information. This cannot be done when a RAID controller handles the redundancy unless a duplicate copy is stored by ZFS in the case that the corruption involving as metadata, the copies flag is set or the RAID array is part of a mirror/raid-z vdev within ZFS.
* Sector size information is not necessarily passed correctly by hardware RAID on RAID 1 and cannot be passed correctly on RAID 5/6. Hardware RAID 1 is more likely to experience read-modify-write overhead from partial sector writes and Hardware RAID 5/6 will almost certainty suffer from partial stripe writes (i.e. the RAID write hole). Using ZFS with the disks directly will allow it to obtain the sector size information reported by the disks to avoid read-modify-write on sectors while ZFS avoids partial stripe writes on RAID-Z by desing from using copy-on-write.